室温沉积Cu夹层ZnO薄膜的光电性能

Optical and Electrical Properties of ZnO Films with Cu Interlayer Deposited at Room Temperature

用磁控溅射技术在室温下制备了纳米Cu夹层ZnO薄膜,经X射线衍射仪、紫外-可见分光光度计和四探针电阻测量仪等测试手段对薄膜的结构、光学性质和电学性质进行了测试.发现该薄膜随着Cu层厚度增加,ZnO层结晶性变差,可见光区域光学透光率减小,透射曲线蓝移,面电阻先迅速下降后缓慢下降.随着ZnO层厚度增加,薄膜c轴择优取向明显,压应力逐渐减小,光学透光率先增大后减小,面电阻随ZnO层厚度增加略有变化.

ZnO films with nanoscale Cu interlayer were deposited by magnetron sputtering at room temperature.The structural,optical and electrical properties were characterized with X-ray diffraction,UV-VIS spectrometer,four-point probe.With increase of Cu interlayer thickness,the crystallinity of ZnO layers grows worse,the optical transmittance decreases in visible wavelength region,the transmittance peak shifts toward short wavelength,the sheet resistance first sharply reduces and then slowly reduces for ZnO films with nanoscale Cu interlayer deposited at room temperature.With increase of ZnO layer thickness,a preferential orientation along c-axis becomes more obvious,the pressure stress reduces gradually,the optical transmittance first increases and then decreases,the sheet resistance varies slightly.