摘要
利用XPS定量测量分子束外延生长的三元合金碲硫锌ZnS1-xTex(0 <x <1)薄膜的组分x ,对比用高分辨率X射线双晶衍射技术的测量结果 ,相对误差小于 10 %。
ZnS 1-x Te x ternary alloy films were grown by molecular beam epitaxy.The films were studied with XPS and high resolution DCXRD to quantitatively determine the stoichiometries of the alloy films.The relative errors of XPS and DCXRD measurements were found to be less than 10%.
出处
《真空科学与技术》
EI
CAS
CSCD
北大核心
1999年第2期151-153,共3页
Vacuum Science and Technology
关键词
X射线
光电子能谱
碲硫锌
薄膜
双晶衍射
组分
X ray photoelectron spectroscopy,ZnS 1-x Te x alloy thin film,X ray double crystal diffraction
