Fe/[NiFe/Cu]_30多层膜线列阵的铁磁共振研究

THE STUDY OF FERROMAGNETIC RESONANCE IN WIRE ARRAY OF MULTILAYER Fe/ NiFe/Cu 30

用铁磁共振（ＦＭＲ）技术研究Ｆｅ／［ＮｉＦｅ／Ｃｕ］３０多层膜线列阵的特性，线列阵采用激光全息光刻和离子束刻蚀技术加工，线密度为２５０线／ｍｍ和５００线／ｍｍ．线列阵样品的ＦＭＲ谱在稍高于主峰（声学峰）的共振场下有光学峰出现，相当层间交换耦合为反铁磁型．光学峰与声学峰的峰位间距沿易轴小于沿难轴．又，来自非磁Ｃｕ夹层的顺磁共振峰的幅度远大于原始的连续膜，说明线列阵加工致使层结构退化．

Abstract The properties of multilayer Fe/ NiFe/Cu 30 wire arrays were investigated by ferromagnetic resonance (FMR) technique. The arrays with wire density of 250 line/mm and 500 line/mm were fabricated utilizing laser hologram lithography and ion beam etching. In the wire array samples, optical peak occurs at higher field than the acoustic peaks and the exchange coupling between the NiFe layers is therefore antiferromagnetic. The optical peak along the easy axis lies closer to its acoustic counterpart than that along the hard axis. For wire arrays the paramagnetic resonance of the Cu layers is much stronger than the continuous film. This shows the degradation of the layer structure after the array fabrication.