柔性衬底微晶硅太阳电池量子效率的研究

Study on Quantum Efficiencies of Microcrystalline Silicon Solar Cells on Flexible Substrates

通过对微晶硅太阳电池量子效率的测量,结合微区拉曼光谱和电学特性测试,讨论了本征层的硅烷浓度和等离子体辉光功率对太阳电池量子效率的影响。发现本征层硅烷浓度增加时,电池的长波响应变差,材料结构由微晶相演变成非晶相;等离子体辉光功率的增加造成了电池短波响应的变化。同时发现测量微晶硅太阳电池时使用掩膜板所得短路电流密度与量子效率积分获得的短路电流密度相差不大。将优化后的沉积参数应用于不锈钢柔性衬底的非晶硅/微晶硅叠层太阳电池,获得了9.28%(AM0,1353 W/m2)和11.26%(AM1.5,1000 W/m2)的光电转换效率。

With the measurement of quantum efficiencies,Raman spectra and electrical characteristics,the effects of silane concentrations and plasma discharge powers on quantum efficiencies of microcrystalline silicon solar cells had been discussed.It is found that the long wavelength responses of solar cells decrease when silane concentrations increase,and the short wavelength responses of solar cells changes when plasma discharge powers increase.It is also found that the short-circuit current density are almost the same between measured by illuminated J-Vwith masks and by quantum efficiency.With the optimized deposition parameters,amorphous silicon/microcrystalline silicon tandem solar cells on stainless steel flexible substrates with conversion efficiency of 9.28%（AM0,1353 W/m^2） and 11.26%（AM1.5,1000 W/m^2）were obtained.