溶胶-凝胶法制备Mg掺杂ZnO薄膜的微结构与光学性质

Microstructue and Optical Properties of Mg-doped ZnO Thin Films Prepared by Sol-gel Method

采用溶胶-凝胶技术在Si(111)和石英玻璃衬底上制备了Mg掺杂ZnO薄膜。用X射线衍射仪(XRD)、原子力显微镜(AFM)、扫描电镜(SEM)和紫外-可见(UV-Vis)分光光度计测试薄膜的微结构、表面形貌和光学性质。结果表明:所得Mg掺杂ZnO薄膜仍为六角纤锌矿型结构,呈c轴方向择优生长,随着退火温度升高,薄膜的晶格常数c由0.5288 nm减小到0.5278 nm,粗糙度从3.8 nm增大到6.5 nm,光学带隙由3.26 eV增大到3.31 eV。

Mg-doped ZnO thin films were prepared by sol-gel method on Si（111） and quartz glass substrates.The microstructure,morphology,and photoluminescence of the Mg-doped ZnO thin films were studied by X-ray diffraction,atomic force microscopy,scanning electron microscopy,and fluorescence spectrophotometer.The results indicated that the Mg-doped ZnO thin films are polycrystalline with hexagonal wurtzite structure and a higher preferential c-axis orientation.As the annealing temperature increasing,the lattice constant cdecreases from 0.5288 nm to 0.5278 nm,the root mean square increases from 3.8 nm to 6.5 nm,and the band gap increases from 3.26 eV to 3.31 eV.