最优实验条件下碳纳米管膜电极的制备

Fabrication of Carbon Nanotubes Film Electrode in the Optimal Experimental Conditions

利用微波等离子体化学气相沉积（MPCVD）方法,在附着有催化剂的石墨片衬底上原位沉积了碳纳米管膜电极。通过正交设计方法综合研究了反应温度、镍膜厚度、沉积时间、甲烷流量对碳纳米管膜电化学性能的影响。结果表明：不同条件下制备的碳纳米管膜的电化学性能有很大差异,其中起主要作用是甲烷流量和反应温度。保持工作压强（6.5×10^3Pa）和氢气的流量（100 sccm）不变,温度为700-800℃时,甲烷流量为5 sccm,N i膜厚度为150nm,生长时间为5 m in,所得碳纳米管膜电极电化学性能最佳,氧化峰电流最大,达到14 nA。

The CNTs film electrode were in-situ synthesized on catalyst attached graphite-chip substrates by MPCVD.The influence of the reaction temperature,nickel film thickness,deposition time,and methane flow rate on electrochemical properties of such deposited carbon nanotubes films were investigated by orthogonal design method.The results showed that the electrochemical properties of carbon nanotubes films prepared under difference conditions have great difference,the reaction temperature and methane flow rate are the major factors in the reaction.The CNTs film electrode prepared under condition of working pressure（6.5×10^3 Pa） and hydrogen flow（100 sccm） constant,temperature of 700-800 ℃,the methane flow of 5 sccm,Ni film thickness of 150 nm,the growth time of 5 min,have the best electrochemical properties,the oxidation peak current is 14 nA.