摘要
在纯氢气气氛中对用HFCVD法制备的无晶面的微晶金刚石薄膜进行了扩散热处理,结果表明,微晶金刚石在扩散热处理过程中将选择性长大,形成(100)面金刚石,对低压合成金刚石过程中形成(100)面金刚石和扩散热处理中形成的(100)面金刚石的机理作了讨论。
In this paper, the microcrystalline diamonds synthesized by HFCVD were carried out diffuse heat treatment in hydrogen atmosphere. The results indicated that the microcrystalline diamonds would be selectively grown and (100) faces appeared on the film surface on the process of diffuse heat treatment. The mechanism of(100)face appeared in the low-pressure synthesis of diamond and diffusion heat treatment was discussed.
出处
《兵器材料科学与工程》
CAS
CSCD
北大核心
1999年第2期20-24,共5页
Ordnance Material Science and Engineering
基金
广东省自然科学基金