外差干涉测量系统的标定

Demarcation for the measurement system of heterodyne interference

对纳米级测量系统进行标定是一个难题。结合某一外差干涉测量系统，提出了一个对测量系统的分辨力、输入输出特性进行标定的简单易行的方法。

It is a difficult to demarcate a measurement system which accuracy is within in nanometre order. Puts forward a simple method to demarcate the input output characteristic and resolution of the measurement system of heterodyne interference.