摘要
纳米多层膜因常出现物理或力学性能的异常而成为薄膜研究的热点之一。采用ＸＲＤ和ＴＥＭ技术研究了Ｗ／Ｍｏ纳米多层膜微结构。结果表明，Ｗ和Ｍｏ由于同为体心立方结构，且晶格常数相近，由它们交互重叠形成的纳米多层膜具有柱状晶穿过调制界面外延生长的结构特征，形成多晶超晶格结构。
The research on the nano multilayer films
has attracted wide attention because of their anormal properties in physics and mechanics
The microstructure of the W/Mo nano multilayer film has been investigated by means of XRD
and TEM in this paper It is shown that,due to W and Mo having the same BCC structure with
approximately lattice constant,columnlar grains grow through modulaion interface in the way of
epitaxy, forming polycrystal superlattice in the nano multilayer films
出处
《材料工程》
EI
CAS
CSCD
北大核心
1999年第3期24-27,共4页
Journal of Materials Engineering
