一种基于微流控技术的光开关阵列设计与研制

Design and fabrication of an novel plane optical switch array device based on optofluidic technique

提出一种基于微流控技术的二维电光开关阵列装置,其基本形式为"储气层+波导层+储液层"的结构。通过气压与电润湿效应双重作用实现对光开关单元中液柱高度的控制,从而控制光路中光束的全透射和全反射以实现光的"开"和"关"。讨论了光开关的工作电压、插损和响应时间等参数。研制结果表明,该结构具有体积小、结构简单、功耗低、能实现集成化和微型化制作的特点。

A novel plane optical switch array device based on optofluidics is proposed,whose basic structure includes a core waveguide layer between a gas layer and a liquid layer.The liquid height of the optical switch unit is controlled by the pressure and the electrowetting effect to achieve full transmission and total reflection of light ＂on＂ and ＂off＂.In addition, the optical switch parameters such as operating voltage, insertion loss and response time are discussed.The results show that this structure has lots of advantages, such as small size, simple structure, low power consumption,easy integration and easy miniaturization.