摘要
利用飞秒激光实现了对PZT厚膜(十几至上百微米)材料的精确烧蚀和图形化研究.飞秒激光脉宽为130fs,重复频率为1kHz.首先利用飞秒激光脉冲能量与烧蚀点大小的关系,得到飞秒激光烧蚀PZT厚膜的能量阈值为100J/cm2,然后利用功率为50～300mW的飞秒激光对PZT压电厚膜进行烧蚀和图形化研究.结合飞秒激光加工的无热影响和无掩膜等特性,在一定的扫描控制下,可以实现对PZT厚膜高精度和高效率的加工.最后,在功率为300mW、扫描速率为5mm/s条件下实现了对PZT厚膜驱动器的图形化.经测试表明,图形化以后,PZT驱动器驱动性能有明显(30%)地提高.
Femtosecond laser was used for the ablation and patterning of PZT thick films.The pulse width of the laser was 130fs,and the repetition rate was 1kHz.First,based on the relationship between the diameter of the ablated crater and the applied peak fluence,the ablation threshold fluence 100J/cm2 for PZT was estimated by determining the magnitude of the peek fluence for zero ablated spot diameter（no damage）;then,50to 300 mW femtosecond laser was used to pattern the PZT thick film actuator accurately and efficiently,the process of which had no heat affected zones and did not need a mask.Under the feed rate of 5mm/s,the PZT thick film actuator was patterned.The driving ability of the actuator is enhanced by 30%after patterning.
基金
国家自然科学基金(50875250)
中国科学院知识创新工程方向性项目资助
