微硅型扭摆式静电力平衡加速度计的设计分析

Design and Analysis of a Planar Vibrator Micro Silicon Accelerometer with Electrostatic Balance

】文中详细提出了微硅型扭摆式静电力平衡加速度计设计的基本理论，根据加速度计的性能指标，应用该理论可以确定加速度计的结构参数；测量电路的回路增益、再平衡电压等电气参数。

In this paper,the basic theory of design for a planar vibrator micro silicon accelerometer with electrostatic balance is presented.According to the accelerometer′s specification,this theory can be used to define the structural parameters of the accelerometer,the electrical parmeters of loop gain and re balanced voltage of the circuits can also be measured.