大功率汞灯电源测控系统研究

Research of power supply measurement and control system for high power mercury lamp

为确保大功率汞灯曝光系统能够稳定、安全可靠地运行,设计了一套较为完善的汞灯电源测控系统。采用适合强电磁干扰环境下的磁平衡电压电流传感器及相应信号处理电路;选用基于铂热电阻传感器Pt100的三线制恒电流激励温度信号检测线路;采用高线性光耦HCNR200构成模拟信号高电压隔离放大器输出控制信号;采用模拟PID控制与数字控制相结合的方式实现恒电流、恒功率控制;给出了采用模拟乘法器计算功率信号并进行负载线路功率损耗补偿的方法。实验结果表明,该系统恒电流控制稳定性达±0.05%,恒功率控制稳定性达±0.5%。

For ensure stability, credibility and safety of exposure system for high power mercury lamp, perfect relatively power supply system on measuring and controlling for mercury lamp was designed. Magnetism balance voltage and current sensor and it＇s signal disposal circuit in the condition of strong electromagnetism turbing were adopted, temperature signal detect circuitry powered by three lines constant current and based platinum resistance sensor Pt100 was selected, analog controlling signal outputted by high voltage insulation and amplifier constituted by high linearity light-coupling HCNR200 was adopted, at the same time, the constant current and power were achieved by associative controlling mode of analog PID and digital, finally, the system adopted simulation multiplication to calculate power signal and introduced the method on power wastage compensatory for load circuitry. Experiment result indicates that the constant current stability reaches ± 0.05%, and constant power stability reaches ±0.5%.