摘要
介绍了一种新型工程表面粗糙度两用测量系统的设计原理、仪器结构及测试结果。该系统可采用接触法和非接触法两种测量方式，接触法测量范围达±１００μｍ，最小分辨率为０．００５μｍ；非接触法测量范围达±２５０μｍ，最小分辨率为０．０１μｍ。
The principle,structure and experiment results of a surface roughness synthesis measuring system are introduced.The system can be operated by contact or non contact measuring method.The maximum vertical measuring range by the contact method can reach ±100μm with a minimum resolution of 0.005μm and that by the non contact method can reach ±250μm with a minimum resolution of 0.01μm.
出处
《工具技术》
北大核心
1999年第4期28-30,共3页
Tool Engineering
基金
国家自然科学基金
