摘要
论述了硬质薄膜的发展历史,分析了近年来硬质薄膜的发展现状;叙述了合成硬质薄膜的几种方法,并对各种方法的优缺点进行了对比分析。指出类金刚石薄膜、纳米复合硬质薄膜等依然是今后一段时期的研究热点。
The latest historical development of carbide films preparation processes is briefly described in this paper;the synthesis of carbide films in several ways are described,and the advantages and disadvantages of each method are compared too.It is conspicuous that the DLC,nano-composite carbide films are still the research focus in the coming period.
出处
《宁波教育学院学报》
2010年第5期82-85,共4页
Journal of Ningbo Institute of Education
