高精度干涉检验移相算法对振动误差的免疫能力

Immunity of phase shifting algorithms to vibration errors in high-accuracy interferometry

对移相干涉测量中影响移相稳定性,从而产生测量误差的小幅度机械振动进行了研究,建立了振动误差模型,仿真分析了Wyant84b三步算法、Hariharan87五步算法、七步算法和十三步算法4种不同移相算法对振动的免疫能力。模拟结果显示,十三步算法对振动的免疫能力最好,与已发表文献成果吻合,说明本文的模拟具有较高的可信度,在一定程度上能够对影响干涉仪精度的振动误差进行合理预测,并能够起到评价和筛选移相算法的作用。

As vibration errors are the crucial source of error in a high accuracy interferometric test,this paper researches the effect of mechanical vibration on the phase shifting stability.It establishes vibration error models and simulates the immunity of vibration by using the three-step algorithm,five-step algorithm,seven-step algorithm and thirteen-step algorithm,respectively.The results show that the thirteen-step algorithm is the best in immunizing the vibration.For the results agreed with that in other literature,it proves the simulation in this paper is believable.To some extent,the method can give a reasonable prediction of the vibration error which effects the precision of interferometer and it also can evaluate and select the algorithm of phase shifting.