激光位移传感器的光学系统设计

Optical design of laser displacement sensor

针对目前国内自主研制的激光位移传感器精度低,测量范围小等问题,提出了一种采用光学设计软件预先仿真整个激光位移传感器光学系统的方法。在分析系统各部分的光学特性的基础上,结合具体要求设计了一个激光位移传感器的光学系统,其工作范围为(50±10)mm。采用系统分割的方法,将整个光学系统分为两部分进行设计,第一部分是激光束的整形透镜,要求在有效的工作范围内得到小而均匀的出射光斑,设计结果表明,在测量范围内,光斑大小能够控制在10-1mm量级;另一部分是被测面散射光接收的成像物镜,该系统的特点是物面和像面相对于光轴都有一定的角度,实验结果表明其成像满足Scheimpflug条件。

According to the low precision and limited measuring range of a domestic independent-developed laser displacement sensor,a method which simulates the whole optical system using optical design software is proposed in this paper.Based on the analysis of each part＇s optical properties in the system,an optical system of laser displacement sensor with the measuring range of（50？？0）mm is designed to meet the practical requirement.With a separate approach,the whole optical system can be divided into two parts to be designed separately.The first part is a shaping lens of laser beam,which requires that the emerging spot is small and uniform in the effective working range.The result of design shows that the spot size can be controlled in the order of 10-1 mm.The other part designed is an imaging lens,which receives the scattered light from the measured surface.The properties of this part require that there is a certain angle between the planes of object and image and the optical axis.In the end,the designed results demonstrate that the images match Scheimpflug＇s condition.