摘要
介绍了三氯氢硅的基本性质、用途、生产工艺和生产设备,并针对生产过程的要求提出了控制解决方案。
The basic properties,application,production process and facilities of trichlorosilane were introduced,and control solutions were put forward to meet the demand in the production process.
出处
《云南冶金》
2010年第5期44-47,共4页
Yunnan Metallurgy
关键词
三氯氢硅
流化态沸腾炉
串级控制
比例控制
trichlorosilane
fluidized bed furnace
cascade control
proportional control
