磁控阴极溅射靶三维磁场的有限元分析

Analysis of 3D magnetic field in mag netic control cathode splash target by finite element method

采用有限元方法对磁控阴极溅射靶三维磁场进行了计算和分析．该装置是一种用于玻璃镀膜的永磁装置，主要由永磁体、铁磁材料和不锈钢板组成．为保证靶中不锈钢板表面的磁场均匀分布，进行了多种方案的计算和调整，给出了一种实用方案，使得装置性能得到明显改善．

In this paper, the finite element method was used to calculate the 3D magnetic field of magnetic control cathode splash target (MCCST). Different schemes were computed and adjusted in order to improve the magnetic flux distribution on the surface of stainless steel plate in MCCST. In the final, a fairly good structure in which the magnetic distribution met the preset requirement was chosen.