WO_3对O_3敏感特性研究

Study on the Sensitive Properties of WO 3 to Ozone

】实验发现ＷＯ３半导体材料对Ｏ３有好的敏感特性，而且元件的烧结温度和工作温度对其敏感特性有大的影响。在对这些参数优化的基础上，研制出了具有较好特性的Ｏ３气敏元件。测定了元件灵敏度与Ｏ３浓度的关系，初步讨论了元件对Ｏ３气体敏感的机制。

It is found that WO 3 semi-conductive material has excellent sensitivity to O 3 in our experiments. Furthermore, the sintered temperature of prepared element and operating temperature of the ozone sensor effect on the sensitivity greatly. A perfect ozone sensitive sensor has been made by improving those parameters. The relation between the sensitivity of the sensor and the O 3 concentration has been studied, and sensitive mechanism of the ozone sensitive sensors has been preliminarily discussed.