CO2激光等离子体极紫外光源收集镜研究

Research of collector mirrors of CO_2 laser produced plasma EUV source

为了研究极紫外光源系统中收集镜的形状和液体微滴的漂移,计算了收集镜的参量,并采用ZEMAX模拟了液体微滴上下和左右漂移50μm,100μm,150μm时中间焦点的成像变化情况。结果表明,液体微滴在上下方向上的漂移对中间焦点成像的影响很大,应该尽量将上下漂移控制在20μm以下;而液滴在光轴方向上的漂移对中间焦点成像的影响稍小。

In order to study the shape of the extreme ultraviolet （EUV） collector mirror and liquid droplets drift of the EUV light source system, the parameters for the collector mirror were calculated. The images of the intermediate focus were simulated with ZEMAX when the liquid droplets drifted 50μm, 100μm, 150μm from top to bottom and from left to right. The results show that the drift of the liquid micro-droplets in the upper and the lower direction have great influence on the imaging of the intermediate focus point, the drift should be controlled below 20p^m in this direction, and the drift of the liquid micro-droplets in the optical axis direction have smaller influence on the imaging of the intermediate focus point.