等离子体稳定性对曲面金刚石膜生长的影响

Effect of plasma stability on growth of convex diamond films

采用直流等离子体喷射化学气相沉积(DCPJCVD)制备曲面金刚石膜,等离子体稳定性对金刚石膜生长十分重要。研究表明,曲面金刚石膜长时间生长,阳极积聚石墨碳点,等离子体流动受阻失稳,金刚石膜含较多杂质。通过对阳极除碳处理,可维持稳定的等离子体、稳定的电子温度Te、均匀的活性原子及原子基团密度。制备的金刚石膜经SEM、Raman等表征,发现曲面金刚石膜致密、晶粒均匀,仅发现金刚石特征峰,制备的曲面金刚石膜质量较高。

Convex diamond films were prepared by direct current plasma jet chemical vapor deposition（DCPJCVD）,and it was important to keep plasma stability on growth of convex diamond film.The results showed that,when convex diamond film grew in long time,anode usually accumulated graphite,and it hampered plasma moving,which caused quality of convex diamond film worse.Graphite is removed in good time,and it still can hold stabile plasma,stabile electron temperature Te and uniform active atom and radical density.Convex diamond film prepared was characterized by some techniques such as SEM and Raman.It was found that convex diamond film was compact and crystal size is homogeneous,and there is only diamond characteristic peak in diamond film.Thus,high quality convex diamond was prepared.