摘要
介绍了一种掩模版制版用夹具装置,该装置具有准确的定位功能,能够自动补偿片厚误差,可进行真空复印使母掩模版与子掩模版紧密贴附,操作方便等特点。
The paper introduces one kind of chuck fitting used in mask lithography and the characters of the fitting are as following： having the function of positioning precisely,compensating the thickness error of mask automatically,contacting mother mask and sub mask tightly by pumping vacuum,operating conveniently.
出处
《电子工业专用设备》
2010年第11期49-51,共3页
Equipment for Electronic Products Manufacturing
关键词
制版
定位
片厚补偿
真空复印
Lithography
Positioning
Mask thickness compensation
Vacuum printing
