双频激光外差干涉的应用技术

Laser Heterodyne Frequency Interference Technology Application

针对以往双频激光外差干涉的舍去高阶误差测量方法,而这种方法在精度要求上已经越来越显得捉襟见肘,不适用于要求精度高的仪器,如纳米技术、机械加工等.本文结合双频激光外差干涉的速度快、精度高、抗干扰能力强、重复性好、溯源性强等特点,根据多普勒频移公式,建立了超精密矢量住移的测量方法.这种测量方法被广泛应用于数控机床、三坐标测量机等,动态特性测量和分析.

The past double-frequency laser heterodyne interference eliminated higher-order error measuring method,and this method in accuracy requirement has become more and more richly and do not apply to the requirement of high precision instrument,such as nanotechnology, machinery processing etc.Combining with dual-frequency laser heterodyne interference speed and precision, strong anti-jamming capability, repeatability and traceability strong sexual characteristics,according to the doppler frequency formula,established ultra-precision vector displacement measurements.The measurement methods are widely used in the numerical control machine tools,tri-ordinate measuring machine etc,dynamic measurement and analysis.