摘要
主要介绍一种光刻机投影物镜温度补偿控制的原理及控制算法。根据系统结构、对象特性和过程指标要求，采用了一种智能型线性－模糊控制器，获得了优良的动态和稳态性能。
The principle and control algorithm of temperature compensation for Sub Micron projection lithography objectives are introduced. Akind of intelligent linear fuzzy controller is developed according to the system structure and object's dynamic feature and the targets of processing. The excellent dynamic and stationary features are gained.
出处
《微细加工技术》
EI
1999年第2期71-78,共8页
Microfabrication Technology
关键词
投影物镜
温度补偿
光刻
大规模集成电路
Projection objectives
Temperature compensation
Fuzzy control
Optimum control
Intelligent linear fuzzy controller
Simulation
