时栅位移传感器高精度驱动电源研究与设计

Study and Design of Driving Power of Time Grating Displacement Sensor

针对时栅位移传感器需要高度均分性的三相驱动电源的要求,在传统DDS技术的基础上,采用数字闭环控制技术,将相位误差测量值作为闭环反馈,在DDS模块中增加相位自动修正技术,使三相驱动电源达到高精度稳频和高精度三相对称的目的。实际应用表明,该驱动电源大大提高了时栅位移传感器的稳定性和测量精度。

In order to solve the requirement of high precision equal phase in three-phase AC power supply for time grating displacement sensor,one AC power supply was designed based on the traditional DDS technology.In the design,the digital close-loop technology was adopted and the measured results from the circuit of automatic measuring phase difference were used as the feedback and the phase difference was corrected and compensated in the DDS.Thus the high stability of frequency and equal phase in three-phase AC power was achieved.Applications show that the stability and measuring precision of time grating sensor is improved greatly.