金刚石砂轮V形尖端的数控对磨微细修整技术

CNC mutual-wear micro truing technique of diamond wheel V-tip

针对金刚石砂轮V形尖端的微细修整困难的问题,开发出一种对磨成型的V形尖端修整技术。在数控修整中,砂轮作V形的直线插补运动与修整工具对磨,逐渐被修整成V形尖端。本实验中修整工具分别是#600和#180绿碳化硅(GC)油石,砂轮分别为SD 400和SD 600金刚石砂轮。实验结果表明,较细粒度的修整工具不仅可以将砂轮V形尖端修整出更小的圆弧半径,而且也能够将微小磨粒修锐得更锋利,从而使加工的单晶硅微沟槽形状更加整齐。此外,采用修整后的圆弧半径小于20μm的SD 600金刚石砂轮V形尖端可以实现光纤石英微阵列沟槽的微细加工,也可以在SiC陶瓷和WC合金基板上加工出微锥塔阵列空间的功能表面。因此,数控对磨在位修整的工艺可以用于金刚石砂轮V形尖端的微细修整,实现硬脆性基板的微细磨削加工。

Due to the difficulty in truing the micro V-tip of diamond grinding wheel,a CNC form truing technique by mutual-wear was developed.During the truing experiment,the diamond wheel was driven along a V-shape straight interpolation movement to produce a mutual-wear between the wheel and the oilstone.Green carbide（GC） oil stones of grit size #600 and #180 were used respectively as truing tools.The diamond wheels to be trued were of grit size SD 400 and SD 600.Experiment results showed that,truing with finer GC stone could not only produce smaller V-tip radius,but also dress the micro grain edges sharper,leading to a more integrate topography of ground micro-groove on silicon.The experiment results also proved that,it was feasible to produce V-groove array on a quartz substrate for optical-fiber application,as well as to pattern micro pyramidal array on SiC ceramic or WC alloy substrate,by using a SD 600 diamond grinding wheel with dressed V-tip radius 20 μm.It is concluded that this CNC mutual-wear on-line truing is applicable to V-tip form truing of diamond grinding wheel for micro grinding of hard and brittle materials.