磁流变抛光光学表面加工面形控制技术研究

Surface shape control in optics manufacturing using magnetorheological finishing

磁流变抛光是一种新型超精密光学表面加工方法。由于其抛光过程可控,磁流变抛光过程可以有效去除表面及亚表面破坏层,提高表面质量,修正元器件表面面形误差。抛光过程容易实现计算机数控,通过数控过程的合理设计,磁流变抛光过程可以有效地对球面及非球表面进行抛光加工。研究了实现面形修正的驻留时间算法,并对光学球面器件进行了试验加工,抛光后其表面面形误差2点峰谷值从0.17μm降低到0.07μm。

Magnetorheological finishing（MRF） is a novel precision optical machining technology.Owing to its flexible finishing process,MRF can eliminate the surface and subsurface damage,improve the surface quality and correct surface figure errors.The finishing process can be easily controlled by a computer.Through proper designing of numerical control,spheric and aspheric optics can be machined by MRF with high quality.The surface shape correcting was achieved using dwell time algorithm method,optical sphere workpiece was machined using this method and the surface shape error value of 2 point peak-valley was improved from 0.17 μm to 0.07 μm.