基于步距规的坐标测量机的误差补偿方法

Geometric error compensation of coordinate measurement machine with step gauge

数值误差补偿是提高三坐标测量机测量精度的经济而有效的手段。利用步距规在测量空间的不同位置与几何误差的数学关系,提出一种基于步距规的三坐标测量机的误差分析方法,得出三坐标测量机的定位误差、角摆误差、垂直度误差和直线度误差,并在三坐标测量机上进行了误差补偿实验,验证了该方法的有效性。该方法对机床导轨的几何误差分析也同样适用。

Numerical error compensation is an effective and economical way to improve the measurement accuracy of coordinate measurement machine （CMM）. Using the relationship between geometric error and volume space of CMM, an error compensation method based on step gauge is proposed. The error sources, including position error, angle error, squareness error and straightness error, are obtained respectively. Error compensation experiments were carried out on CMM. Experiment results prove the effectiveness of the method. The method is also suitable for the geometric error analysis of machine tool guide rail.