摘要
利用二元光学技术制成二元光学元件,它可以制作有特殊功能高衍射效率的光学元件。本文介绍了这种技术的基本原理、制作工艺和流程以及近年来研究的几种有应用前景的二元光学元件。
This deveice made by the new kind of binary optics is called binary optical device,which has high efficiency with special function.In the paper,we introduce the fundamental mineral fabrication and technological process and some binary optical device with application background in recent year.
出处
《激光与红外》
CAS
CSCD
北大核心
1999年第3期181-184,共4页
Laser & Infrared
关键词
二元光学元件
位相型
衍射效率
微电子技术
binary optical device,phase,diffraction efficiency,microelectronic technique.