电子束刻蚀数字像元全息图

Digital pixel hologram by means of e beam lithography

作者在研制激光数字点阵全息图的基础上，尝试使用电子束刻蚀系统制作数字像元全息图以期用于防伪和保密模压全息图的制作。并对电子束刻蚀系统制作数字像元全息图的优缺点加以讨论。

Trial fabrication of digital pixel hologram which are recorded by an electronic beam lithography system to apply to fabrication of embossing hologram for anti counterfeiting and security is described.The advantage and disadvantage of EBL digital pixel hologram is discussed.