摘要
本文在GaAs/GaAlAs外延材料上设计和制作了MMI型1×4光功分器。文中首先给出器件的基本工作原理和特点,随后主要讨论器件制作中的GaAs材料的干法刻蚀工艺,最后给出器件测试结果。
In this paper,a 14 MMI optical power splitter is designed and fabricated in GaAs/GaAlAs epitaxial materials.The basic operating mechanism of this device is briefly presented first.Due to the properties of MMI devices,the dry etching technique for GaAs materials is then discussed.The measuring results and related discussion are also presented.
出处
《光电子.激光》
EI
CAS
CSCD
1999年第3期203-206,共4页
Journal of Optoelectronics·Laser
基金
浙江省自然科学基金
曹光彪高科技发展基金
关键词
集成光学
多模干涉
光功分器
干法刻蚀
integrated optics
multimode interference
optical power splitter
dry etching technique