摘要
对ＴＦＴ（ＴｈｉｎＦｉｌｍＴｒａｎｓｉｓｔｏｒ）的栅线及阵列缺陷的表现及成因进行了分析。在实际工艺过程中避免这些缺陷有利于提高器件成品率。
The defects of the gate line and the array of TFT were studied in this paper It′s beneficial to improve the quality of display and raise the end product rate if these defects were avoided in the technology process
出处
《液晶与显示》
CAS
CSCD
1999年第2期126-130,共5页
Chinese Journal of Liquid Crystals and Displays
基金
中国科学院"九五"重大项目
吉林省科委"九五"科技攻关项目
