衬底偏压对ECR等离子体鞘层和离子行为的影响

INFLUENCE OF SUBSTRATE BIAS ON THE SHEATH AND ION BEHAVIORS IN ECR PLASMAS

介绍电子回旋共振（ＥＣＲ）微波放电等离子体中离子向衬底输运的蒙特卡罗模型，该模型考虑了精确依赖于离子能量的电荷交换和动量转移截面以及中性区与鞘层的衔接。通过模拟氩离子在中性区与鞘层内的输运过程，在碰撞鞘层基础上着重分析了衬底偏压对鞘层内电势、离子能量分布和离子运动的角分布等鞘层特性和离子行为的影响。

To simulate the ion transport through the neutral region and the sheath in an electron cyclotron resonance (ECR) discharge,a physical model,taking into account the effect of the cross sections for charge exchange and momentum transfer on the ion energy and the influence of the joint of the neutral region and the sheath,is established and the related Monte Carlo code is developed.By simulating the transport of argon ions in the sheath,the influence of the substrate bias on the sheath characteristics and the ion behaviors is discussed on the basis of collisional sheath,which may be of significance for the application of ECR plasmas.