摘要
研制了一种新型电磁表面波等离子体源，并对其参数和特性进行了实验研究。实验结果表明，该源在２３０Ｐａ以下的气压范围内成功地产生了直径在１６０ｍｍ以上、电子密度达１０１０－１０１１ｃｍ－３、电子温度只有几电子伏特的大面积均匀等离子体柱，适合于大面积。
The design and experimental investigation of a new type plasma source produced by electromagnetic surface waves is given.The experimental results show that the source has successfully produced a homogeneous plasma column in diameter over 160mm with electron density of 10 10 -10 11 cm -3 and electron temperature of several eV at a pressure below 230Pa.This manifests that the source is adaptable applications for large area and large volume plasmas.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
1999年第2期101-104,共4页
Nuclear Fusion and Plasma Physics
基金
国家自然科学基金
关键词
电子温度
电磁表面波
等离子体源
Electron temperature Electromagnetic surface wave Plasma source
