外磁场对直流等离子体炬放电特性的影响

EFFECT OF MAGNETIC FIELD ON DISCHARGE CHARACTERISTICS OF DC PLASMA TORCH

介绍了新研制的磁约束直流等离子炬设备，计算了螺旋管线圈的磁场分布，通过实验研究了磁场变化对等离子体炬放电特性和伏安特性的影响。在氩－氢等离子体的放电体系中，利用静电双探针测量了离阳极喷口８０ｍｍ处等离子体电子温度和密度沿径向的分布。结果表明，外磁场的存在使等离子炬运行参数范围增大。

A magnetic DC plasma torch is introduced. The magnetic field distributions of solenoid coils have been calculated. The effects of magnetic field on the discharge characteristics and voltage current curve of the torch are investigated. Argon and hydrogen plasma parameters, such as electron temperature and density, are measured with Langmuir probes at 80mm from the nozzle. It shows that magnetic DC plasma torch can work in a wide range of operation parameters, which seems to be applicable to large area and high rate film deposition.