光学设备检测氮化硅膜厚

Vision System Inspection SiN Thickness

氮化硅膜的厚度对于太阳能电池片的转换效率有着比较重要的影响。使用光学设备可以大大加快检测氮化硅膜的速度。为了证明其检测的精度以及可靠性,并普及这种新颖的检测方式,作者首先从理论上验证了氮化硅膜的颜色可以通过光学设备区分开来。其次,通过大量的实验数据对比之后证明了氮化硅膜的颜色与厚度是成线性关系的,并得到了相关的线性曲线图。最后,作者将光学设备所得到的检测结果与目前最普遍的椭偏仪设备的检测结果做比较,证明了光学设备的检测结果完全可靠精确。从而得到结论,使用光学设备检测太阳能电池片的氮化硅膜厚度不仅结果精确可靠,而且在速度上也有很大提升。

The thickness of the SiN coating has more important influence on the efficiency of solar cell. Use the optical device to accelerate measuring the pace of SiN coating thickness greatly. In order to prove its precision and dependability measured,popularize such novel detection way. The author has proved the color of the SiN coating can be distinguished through the optical device in theory at first. Secondly,have compared with through a large number of experimental datas,proved color and thickness of the SiN coating become linear relations, have got the relevant linear curve graph. Finally,the author compares with the testing result of most general leaning tools towards the testing result that the optical device gets at present,have proved the testing result of the optical device is totally reliable and accurate. Thus get the conclusion,that it is accurate to use the optical device to measure the thickness of silicon solar cell SiN coating,and the speed has been promoted greatly.