纳米多层膜力学性能研究进展

Progress in Mechanical Properties of Nano multilayer Thin Films

由两种不同材料交替生长而形成的多层薄膜，其力学性能随调制周期的变化而发生变化，在某一范围出现超模、超硬等异常效应，由于其潜在的实际应用价值及理论意义，纳米多层膜的力学性能成为近年来人们研究的热点。本文综述了近年来国内外学者对纳米多层膜力学性能的研究结果，探讨了出现力学性能异常的机理，为设计新型的纳米多层膜镀层提供理论依据。

Mechanical properties of multilayer thin fil m s composed by alternating layers of two different materials vary with the change o f the modulation period.The supermodulus and superhardness effects are observed at a sp ecific range of modulation periods.Hence the mechanical properties of multilayer t hin films have been paid considerable attentions in recent years because of po tential technological applications and theoretical significance.The research res ults of mechanical properties of nano multilayer thin films are reviewed in this paper. The mechanism of t he mechanical property anomalies has been explored,which is useful for design of new types of nano multilayer thin films.