摘要
采用阴极射线致发光法观察金属有机物汽相外延法生长的具有不同表面形貌的GaN外延层中黄色发光带的强度分布.结果表明六角金字塔形表面形貌对发光强度分布的测量有很大影响.测量和比较表面镜面加工样品的黄色发光带强度分布、原子序数衬度和X射线波谱发现,黄色发光带的强度在含有O和C等杂质缺陷附近较强.高分辨透射电子显微镜观察表明,杂质缺陷区的晶格结构不同于GaN基质,以及位错和裂缝等由应力引起的缺陷.认为此类缺陷可能是生长过程中。
Abstract The intensity distribution of a yellow luminescence
band was observed by cathodoluminescence (CL) on GaN epilayers with different surface
morphologies grown by metallorganic vapor phase epitaxy, which showed that the hexagonal
hillock surface morphology had an effect on CL image of the yellow luminescence band. The
polished epilayers were further investigated by CL image,atomic number contrast,and
wavelength dispersive X ray spectrometry,and were observed that the intensity of the yellow
luminescence band was relatively strong around the defects associated with impurities of
O,C,and so on.The lattice images of high resolution transmission electron microscope exhibited
the structures of the defects different from that of GaN matrix,misfit edge dislocations and
cracks.The results suggest that the defects may result from the precipitations in the V shape
grooves of imperfect coalescence during epitaxy.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第7期1372-1380,共9页
Acta Physica Sinica
基金
国家高技术研究发展计划
国家自然科学基金
福建省自然科学基金