狭缝微放电等离子体参数的光谱测量

Measurement of Plasma Parameters in Slot Microplasma by Optical Emission Spectrum

利用平行管水电极介质阻挡放电装置,在氩气和空气混合气体中,得到了狭缝微放电等离子体。利用发射光谱法,研究了此放电中分子振动温度、分子转动温度和电子的平均能量随气体压强的变化。通过氮分子第二正带系(C3Πu→B3Πg)的发射谱线计算了氮分子的振动温度;利用氮分子离子(N2+)的第一负带系(B2Σu+→X2Σg+)的发射谱线计算了氮分子的转动温度;测量了氮分子离子391.4 nm和激发态的氮分子337.1 nm两条发射谱线的相对强度之比,研究了电子能量的变化。结果表明,当压强从60 kPa增大到100kPa,分子振动温度及分子转动温度均减小,氮分子离子谱线与激发态的氮分子谱线的强度之比亦减小。

Slot microplasma was generated in argon and air mixture by using dielectric barrier discharge device with two parallel water electrodes.The molecular vibrational temperature,molecular rotational temperature and average electron energy of the slot plasma were studied by optical emission spectrum.The molecular vibrational temperature was calculated using the second positive system of nitrogen molecules（C3Πu→B3Πg）.The molecular rotational temperature was calculated using the first negative system of nitrogen molecular ions（B2Σ＋u→X2Σ＋g）.The relative intensities of the first negative system of nitrogen molecular ions（391.4 nm） and nitrogen molecules in the excitation level（337.1 nm） emission spectrum line were measured for studying the variations of electron energy.It was found that the molecular vibrational temperature,molecular rotational temperature and average electron energy decrease with gas pressure increasing.