摘要
在与小功率全Ar-ICP类似的条件下,使用顺序扫描等离子体光谱仪,用Stark加宽法,选择Hβ(486.1nm)谱线,测定了空气-氩气混合气冷却ICP中在感应线圈上0、2、5、10mm处电子密度的侧向分布并将其中部分侧向分布经Abel变换为径向分布。结果表明,空气-氩气混合气冷却ICP中电子密度分布与全Ar-ICP相似,呈离轴峰;随着冷却气中空气含量的增加,离轴峰位置更靠近中心轴;当冷却气中含空气5%~10%时,电子密度数值最大且大于全Ar-ICP中的数值。
The lateral distribution of electron number density at 0、2、5、10 mm above the load coil in Ar air mixed coolant gas ICP was measured with Stark broadening method of H β line(486 1 nm) and some of the lateral distribution was converted into radial distribution by Abel inversion under the condition similar to that in the low power Ar ICP.The results show that the distribution of electron number in Ar air mixed coolant gas ICP is similar to that in Ar ICP and exhibit off axis maxima.When a lot of air was added to the coolant,the positions of the off axis maxima would near the axis.The electron number density reached maximum and was higher than that in Air ICP as 5% 10% air was added to the coolant.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
1999年第3期360-363,共4页
Spectroscopy and Spectral Analysis