半导体激光干涉仪在微振动测量中的应用

Application for micro vibration measurement with a semiconductor laser interferometer

文中介绍一种用半导体激光器构建小型迈克尔逊干涉仪实现对微振动量精确测量的方法，实验证明，这种方法完全可以实现。用这种方法构建的微振动传感器体积小、质量轻。

A new method for micro vibration′s measurement with high sensitivity and accuracy is introduced in this paper. A semiconductor laser micro interferometer is made up according to this method. Experimental results show that the method can be realized. The micro vibration sensors configurated by the new method have many advantages of small volume, light weight and less cost.