金属有机物热分解法制备Bi_4Ti_3O_(12)薄膜的工艺研究

Studies on preparation of ferroelectric Bi 4Ti 3O 12 thin films by the metalorganic decomposition technique

由硝酸铋和钛酸丁酯原料出发，采用金属有机物热分解法（ＭＯＤ）制备了铁电钛酸铋薄膜；对先体溶液进行了红外光谱和差热分析，研究了旋转甩胶工艺和烧结温度与膜厚的关系．由Ｘ射线衍射和扫描电子显微镜分析了薄膜的物相和断面形貌，得到：在４５０～６５０℃较低烧结温度下即可合成钛酸铋致密多晶薄膜．薄膜厚度随烧结温度增高而减小，在５００～６５０℃范围内基本呈线性，温度每增高５０℃膜厚减小约５％．

Ferroelectric Bi 4Ti 3O 12 thin films are prepared by MOD method using tetrabutyl titanate and bismuth nitrate. The Bi Ti precursors are characterized by IR and DTA. Film thickness varying with spin coating process and annealing temperature is discussed. Densified polycrystalline Bi 4Ti 3O 12 thin films are synthesized at relatively low annealing temperatures of 450～650℃. From the SEM morphology of the cross section of sintered films, we have obtained the result that with the increase of annealing temperature, the thickness of the films decreases by about 5% for every increase by 50℃ in the temperature range of 500～650℃.