混合模拟方法模拟电子在固体表面的背散射

Mixed Monte Carlo Simulation of Electron Backscattering from Solids

将电子输运的直接模拟方法和压缩历史方法相结合,建立能量为50 eV～1 GeV范围的电子在介质中输运的混合模拟蒙特卡罗方法.通过调整散射角参数和损失能量参数控制单次碰撞发生的次数,输运过程中单次碰撞采用直接模拟,在两次直接碰撞之间使用压缩历史方法模拟发生的多次小碰撞过程.利用该方法模拟电子在固体表面的背散射过程,探讨不同计算参数对计算效率和结果的影响,计算不同能量电子在固体表面的背散射系数和出射电子能量分布,计算结果与实验数据符合较好.

A mixed Monte Carlo algorithm for transport with electrons of energy from 50 eV to 1 GeV is described which combines detailed simulation and condensed simulation.Through adjusting scattering angle and energy loss factors,times of single collisions are decided.In the process,single collisions are simulated with detailed method,and multiple scatterings among single collisions are simulated with condensed method.Results and efficiency of calculation affected by factors mentioned above are discussed.Backscattering on solids induced by incident electrons is simulated.Calculated backscattering coefficients and energy distribution agree with theoretical and experimental results well.