保护膜制备参数对其性能影响的实验研究

Experimental Studies on the Influence of Preparation Parameters of Protecting Layer on Its Properties

以电子束蒸发法制得的ＭｇＯ保护膜为例，对保护膜制备参数，例如基板温度、沉积速率等对保护膜表面结晶结构、形貌及成分等基本特性的影响进行了研究，为保护膜制备工艺的优化提供了指导。

With MgO film deposited by electron beam evaporation as an example,the influence of technical parameters,such as the substrate temperature and the evaporate rate on the basic characteristics of the protecting film are studied.These characteristics include the crystal structure,the surface appearance and the composition of the film.This work can provide a guideline to optimize the preparation process of the protecting film.