摘要
微加工超净实验室是微机电系统（micro-electro-mechanical systems,MEMS）研究的基础条件。超净实验室涉及多种大型微加工设备和相应的纯水、高纯气体、空气净化及空调等辅助系统,其管理显得十分重要。结合重庆大学微机电系统加工实验室,对其现场管理、保障系统运行和设备管理、节能和高效利用、设计和技术管理等进行了简单介绍,同时对MEMS微加工工艺开发与技术管理进行了初步探索。
The fabrication laboratory in a cleanroom is the fundamental condition for the research of micro-electro-mechanical-systems（MEMS）.For the complexity of the MEMS fabrication laboratory with a lot of large equipment and the auxiliary systems such as the pure water,pure gas and cleanroom,its management is very important.Taking the MEMS fabrication laboratory of Chongqing University as an example,this paper gives a brief introduction to the field management,auxiliary system management,equipment management of the MEMS fabrication laboratory.And the fabrication process development and process management are also explored.
出处
《实验技术与管理》
CAS
北大核心
2010年第11期16-20,24,共6页
Experimental Technology and Management
关键词
微电子机械系统
超净间
管理
MEMS（micro-electro-mechanical-systems）
cleanroom
management
