摘要
本文研究了用胶体法制备的ＩＴＯ薄膜的气敏特性；并同时研究了各种掺杂杂质对ＩＴＯ薄膜的气敏特性的影响．通过实验发现ＩＴＯ薄膜对乙醇气体具有最高的灵敏度，对二氧化氮等也有较好的敏感特性，一般催化剂型掺杂物如资金属等掺杂对提高ＩＴＯ薄膜的灵敏度没有多大帮助．ＩＴＯ薄膜与 ＳｎＯ_２薄膜相比具有更高的稳定性．ＩＴＯ薄膜的气敏特性既具有表面控制型的特征，又具有体效应气敏材料的敏感特性．
This paper reports gas sensitive characteristic of ITO film using colloid method. Study the affect of adding impurity for gas sensitive characteristic of ITO film. The sensitivity of alcohol and NO_2 gases is higher. The sensitivity has not been enhanced by addition of activator impurity. The stability of ITO film gas sensor is higher than SnO_2 film. The sensitive characteristic of ITO film possesses surface effect and substance senstitive effect at the same time.
出处
《传感技术学报》
CAS
CSCD
1999年第1期52-56,共5页
Chinese Journal of Sensors and Actuators
关键词
ITO薄膜
胶体法
气敏特性
掺杂
敏感器件
ITO film colloid method gas sensitive characteristic mix impurity.
