摘要
通过建立固态装配谐振器(SMR)模型,考虑硅衬底的声学损耗,从压电理论出发,仿真分析了不同布喇格层数对SMR的谐振性能的影响。仿真结果表明,由于布喇格层对声波的有效反射,减少了声能在衬底的损耗和衬底造成的杂散谐振,使SMR的品质因数得到很大提高;用Si3N4和SiO2作为布喇格层材料,要得到较好的品质因数,布喇格层对数至少要3对;另外,布喇格层厚度稍有偏差,也能使谐振频率处有较高的反射率,获得较好的品质因数。
Base on piezoelectric theory,a solidly mounted resonator（SMR） model was designed to simulate the effect of Bragg reflector to the properties of SMR,considering acoustic loss of Si substrate.The simulation results showed that the quality factor of SMR was greatly improved as the Bragg reflector could reflex acoustic effectively,which reduced the acoustic loss in the substrate and spurious resonance of the substrate.In order to get a better Q,there should be at least three pairs of Bragg reflector using Si3N4 and SiO2.Higher reflectivity of resonant frequency and better quality factor could also be obtained even the thickness of Bragg reflector had little deviation.
出处
《压电与声光》
CAS
CSCD
北大核心
2010年第6期929-932,共4页
Piezoelectrics & Acoustooptics
基金
教育部(广东省)光电子器件与系统重点实验室开放基金资助项目(200708)
关键词
固体装配谐振器
声学损耗
布喇格层
品质因数
solidly mounted resonator
acoustic loss
Bragg reflector
quality factor
