圆形压电单晶执行器的静态模拟与实验验证

Static Modeling and Experimental Validation for Circular Piezoelectric Unimorph Actuators

为了对圆形压电单晶执行器(CPUA)和基于圆形压电单晶执行器的系统(如微阀、微泵等)进行优化设计,基于经典薄板理论并将粘结层作为单独一层考虑,建立了固支边部分覆盖圆形压电单晶执行器在作用电压控制下的挠度特性模型并进行了实验验证。实验结果表明,用建立的模型预测圆形压电单晶执行器的静态挠度与实际测得值吻合,相对误差在4.83%以内,中心挠度相对误差在0.72%以内。

In order to design and optimize the behaviors of circular piezoelectric unimorph actuators（CPUAs） and the CPUAs based systems（e.g.micro-valve,micro-pump,etc）,a new static deflection model for CPUAs has been established by considering the bonding layer as an individual layer and based on the classical laminated plate theory and experimentally validated by the established experimental setup.The research results showed that the predicted static deflections of the CPUAs by the established deflection model agreed well with the experimentally measured results.The relative errors of the predicted deflections along the diameter and the predicted central deflections were within 4.83% and 0.72%,respectively.