摘要
传统真空镀膜机的测量控制系统结构复杂、工作可靠性差、故障率高。用以16位单片机为核心的真空自动测量控制系统更新原控制系统后,对真空度、冷却水温、加热电流及各工作状态能进行实时测量,自动控制真空工作的全过程,能检测故障并自动采取相应的对策。实际应用结果表明,该控制系统是有效的。
The measuring control system for conventional vacuum coaters is complicated in construction with low reliability and high failure rate.Upgrading the original control system by developing a new automatic vacuum measuring control system with the 16-bit single chip microcomputers as its core,the real-time measurement of working pressure,cooling water temperature,heating current and other working parameters were all available,especially the faults could be detected automatically with corresponding trouble-shooting measures taken.The operational results showed the effectiveness of the control system.
出处
《真空》
CAS
北大核心
2010年第6期59-62,共4页
Vacuum
关键词
真空
测量
控制
设计
vacuum
measurement
control
system design
